国際会議Proceedings - 藤本 敏行
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Particle Generation and Its Effectson Film Surface Morphology in TEOS/Oxygen Plasma Enhanced CVD Process
M. Shimada, K. Okuyama, Y. Itoh, T. FujimotoandY. Fujishige,19thAnnual Conference of American Association of Aerosol Research,2000年11月,St. Louis
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(Ba, Sr)TiO3 Thin Film Preparation by Liquid Chemical Vapor Deposition
K. Okuyama, Y. Itoh, T. Fujimoto, T. Murakami, and F. G. Shi,2000 IAMS InternationalSeminar,2000年10月,Fukuoka
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Preparation of (Ba, Sr)TiO3 Films Prepared byLiquid Chemical Vapor Deposition Method
K. Okuyama, Y.Itoh, T. Fujimoto, T. Murakami, and F. G. Shi,The First Joint China /Japan Chemical Engineering Symposium,2000年09月,Beijing
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Evaluation of ion and particle interaction in CVD Process
K. Okuyama, M. Shimada, and T. Fujimoto,Proceedings of Symposium of Dry Process,(頁 245 ~ ),1999年11月,Tokyo
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Measurement of Spatial Distribution of Submicron Particles by Two-Color Polarization-Sensitive Laser Light Scattering Method
M. Shimada, K. Okuyama, T. Fujimoto, and Y. Fujishige,Proceeding of Vapor Phase Synthesis of Materials III,1999年
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Effects of Preparation Conditions on the Characteristics of Titanium Dioxide Particles Produced by a CVD Method
Okuyama, K., M. Shimada, T. Fujimoto, T. Maekawa, K. Nakaso, T. Seto,J. Aerosol Sci.,29巻,(頁 S907-S908 ~ ),1998年
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Film Formation by a New CVD Process using Ionization of TEOS
M. Adachi, T. Hayasi, T. Fujimoto, and K.Okuyama,CVD-XIV-EUROCVD11,(頁 116 ~ ),1997年09月,Paris
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A New CVD Film Formation Process using Ionization of TEOS
M. Adachi, T. Hayashi,T.Fujimoto, and K. Okuyama,Proceedings of ISSM '97,1997年,San Francisco, USA
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Gas-Phase Nucleation an APCVD Film Formation Process using Tetraethylorthosilicate/Ozone System
M. Adachi, K. Okuyama, and T. Fujimoto,5th WorldCong. Chem. Eng., Vol.IV,(頁 779 ~ 783),1996年09月,San Diego