国際会議Proceedings - 藤本 敏行

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  1. Particle Generation and Its Effectson Film Surface Morphology in TEOS/Oxygen Plasma Enhanced CVD Process

    M. Shimada, K. Okuyama, Y. Itoh, T. FujimotoandY. Fujishige,19thAnnual Conference of American Association of Aerosol Research,2000年11月,St. Louis

  2. (Ba, Sr)TiO3 Thin Film Preparation by Liquid Chemical Vapor Deposition

    K. Okuyama, Y. Itoh, T. Fujimoto, T. Murakami, and F. G. Shi,2000 IAMS InternationalSeminar,2000年10月,Fukuoka

  3. Preparation of (Ba, Sr)TiO3 Films Prepared byLiquid Chemical Vapor Deposition Method

    K. Okuyama, Y.Itoh, T. Fujimoto, T. Murakami, and F. G. Shi,The First Joint China /Japan Chemical Engineering Symposium,2000年09月,Beijing

  4. Evaluation of ion and particle interaction in CVD Process

    K. Okuyama, M. Shimada, and T. Fujimoto,Proceedings of Symposium of Dry Process,(頁 245 ~ ),1999年11月,Tokyo

  5. Measurement of Spatial Distribution of Submicron Particles by Two-Color Polarization-Sensitive Laser Light Scattering Method

    M. Shimada, K. Okuyama, T. Fujimoto, and Y. Fujishige,Proceeding of Vapor Phase Synthesis of Materials III,1999年

  6. Effects of Preparation Conditions on the Characteristics of Titanium Dioxide Particles Produced by a CVD Method

    Okuyama, K., M. Shimada, T. Fujimoto, T. Maekawa, K. Nakaso, T. Seto,J. Aerosol Sci.,29巻,(頁 S907-S908 ~ ),1998年

  7. Film Formation by a New CVD Process using Ionization of TEOS

    M. Adachi, T. Hayasi, T. Fujimoto, and K.Okuyama,CVD-XIV-EUROCVD11,(頁 116 ~ ),1997年09月,Paris

  8. A New CVD Film Formation Process using Ionization of TEOS

    M. Adachi, T. Hayashi,T.Fujimoto, and K. Okuyama,Proceedings of ISSM '97,1997年,San Francisco, USA

  9. Gas-Phase Nucleation an APCVD Film Formation Process using Tetraethylorthosilicate/Ozone System

    M. Adachi, K. Okuyama, and T. Fujimoto,5th WorldCong. Chem. Eng., Vol.IV,(頁 779 ~ 783),1996年09月,San Diego

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